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AT1 Thin Film Defects Optical Scanner

The Lumina Instruments AT1 introduces an innovative technology in laser scanning which enables:
  • Full surface scan and imaging of sub -nanometer film coatings and defects
  • 30 sec to scan and display a 50-mm x 50-mm sample
  • Capable on transparent, silicon, compound semiconductor or metal substrates 
  • Accommodates non-circular and fragile substrates
  • Able to separate top/bottom features on transparent substrates 
  • High immunity to vibration
  • Up to 300x300 mm scan area 
  • Up to 10 mm sample thickness

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